Sapphire
Sapphire materials provide increased plasma resistance, reduced particulation and an extended lifespan up to ten times longer than existing materials. When used by manufacturers of equipment components subject to extreme fluorine radical exposure, sapphire decreases equipment downtime and reduces the cost of ownership.

With features such as exceptional compressive strength, high hardness and an excessive temperature limit (2000°C/3632°F), sapphire is well suited for a range of semiconductor and solar wafer processing fluorine plasma applications, from etchant gas delivery tubes to optical windows.

Greene, Tweed and Gavish Industrial Technologies & Materials bring customers the latest in sapphire technology. We collaborate with customers to select one of three distinct manufacturing processes for developing the optimal component design for each unique application.

LITERATURE
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